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Science City Cleanroom

The Science City cleanroom facility is a semiconductor fabrication laboratory in the School of Engineering and is a state-of-the-art facility operated as part of the Science City partnership with the University of Birmingham. The facility is a 150 m2 ISO class 6 cleanroom, with the air filtered to 1000 times normal quality. This allows for the manufacture and testing of experimental electronic devices, as the facility is equipped with lithography, etching, deposition, oxidation, annealing and testing capabilities. More information about the cleanroom capabilities is available below.

Semiconductor devices being probed

 

 

 

 

Profiler in use