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Visualising Dynamic Displacements of Micromachined Devices

We have demonstrated using a commercial white light interferometric microscope, a Wyko NT-2000 surface profiler, to visualise the dynamic motion of a micromachined device. This involves the relatively simple modification of replacing the standard halogen bulb with an LED source to operate stroboscopically, synchronised to the drive signal of the micromachined device.

Schematic of experimental setup
Schematic of experimental setup.

The results shown here are all for a sinusoidal excitation. The devices move at twice the excitation frequency as the electrostatic driving force depends only on the magnitude of the signal.

1K excitation 0ms1K excitation 0.3ms1K excitation 300ms


Example images for 1KHz excitation at 0, 0.2 and 0.3ms after zero crossing of drive signal.


Cross-sectional profiles at various intervals for 1kHz and 10 kHz excitation.


Cross-sectional profiles at various intervals for 1kHz and 10 kHz excitation.


mpeg movies for 1Khz , 10kHz and 20kHz drive signals.